KMLabs filter wheels are extremely useful accessories for the XUUS eXtreme Ultraviolet Ultrafast Source:
• Each wheel includes four apertures which can be rotated into the beam path
downstream from the capillary
• One aperture allows gas flow when pumping down and venting the vacuum
system without the risk of break the thin filters.
• The other three apertures allow for mounting thin film filters of varying
thickness and composition
• Can be used to optimize the ratio of EUV transmission/ IR block for different
EUV wavelengths
• Can be used to calibrate measurements of the EUV flux
• Two filter wheels with two metal filters in series with offset pinholes are optimal
for preventing holes in a single metal plate from transmitting IR light