| Cover — Safety Cover |
| Interlocked safety cover provides protection from direct and reflected laser light. |
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| Image — TTL Viewing |
| Embedded through-the-lens (TTL) image of the process area. Select areas of interest-, optimise contrast-, zoom-, measure using video cursor-, print. |
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| Software — ProcessPower Software |
| ProcessPower control software provides synchronised control over part motion, process motif and laser function, including handy sub-routines and import of industry standard files. |
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| Vision — Part Lighting and Viewing
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| Through-the-lens (TTL) vision system with integrated and adjustable coaxial part illumination. |
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| Laser — ATLEX 300 SI short Pulse excimer |
| The ProMaster is a perfectly matched add-on unit to the ATLEX 300 SI short pulse excimer laser, with the highest beam brightness of its class, superb beam quality and long gas lifetime. |
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| Mask — Mask Options |
| PC driven mask selector with 32 motifs on an interchangeable plate. Optional RVA aperture allows an unlimited number of user-defined 'virtual motifs' to be created and stored in PC memory for subsequent recall.
Mask details. |
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| Energy — Energy Controller |
| Select the appropriate processing conditions for polymer ablation, metal stripping, direct writing, etc., from 0.5-5 J/cm² |
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| Stability — Natural Granite Base |
| the natural granite base offers superb stability for precision micromachining |
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| Motion — Part motion assembly |
| Part motion over 100 x 100 mm with 1 µm resolution and digital position readout. ProcessPower for PM software allows all types of movement synchronised to laser firing |
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| Focus — Precision Focus |
| Smooth manual focus control over 0-10 mm with WYSIWYG feature. Ensures that when the CCTV is in focus the UV projection is also automatically in focus |
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| Lens — UV Projection Lens |
| Three-element confocal UV projection lens with 1.5 µm resolution, specially designed for UV mask projection applications |
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| Theta — Rotation Stage |
| Manual rotation stage with full 360° travel, aids alignment of parts to the X,Y axes |
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| Part — Vacuum Chuck |
| Standard part holder is an 80 mm vacuum chuck for secure holding of all flat parts |
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| Shield — Coaxial Gas Nozzle |
| A coaxial gas nozzle provides He shield gas for debris-free processing of polymers, and efficient removal of ablation products |
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